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PEDITO - a unique plasma generation process

Connect, no. 166, May/June 2010

ITO on a flexible substrate
ITO on a flexible substrate

TWI and Plasma Quest Limited (PQL) are partners in an exciting collaborative project part-funded by the Technology Strategy Board (TSB), for plasma enhanced (sputter) deposition of indium tin oxide and other transparent conducting compounds (TCCs).

The PEDITO project's key differentiator is PQL's unique plasma generation process that enables the sputter deposition of high rate, high quality coatings of many different materials at ambient temperatures.

After only three months, this one year project is significantly ahead of the original plan, with some exceptional early stage results.

Outside the PEDITO project, but potentially for further inclusion, other materials deposited at ambient temperatures include a wide range of dielectrics. Such materials can enable the fabrication of transparent semiconductors suitable for flexible electronics applications.

With the progress made thus far the project will concentrate more of its activities in developing a large area deposition process. The project's technical leader, Dr Peter Hockley of PQL, is already developing a revolutionary system that will offer a fully integrated source and target solution capable of even greater widths whilst being readily retrofittable to a variety of tools. With an initial deposition width of 1m, future developments to 3m widths are planned.

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